JPH0631642Y2 - 精密位置決め機構 - Google Patents

精密位置決め機構

Info

Publication number
JPH0631642Y2
JPH0631642Y2 JP1988004475U JP447588U JPH0631642Y2 JP H0631642 Y2 JPH0631642 Y2 JP H0631642Y2 JP 1988004475 U JP1988004475 U JP 1988004475U JP 447588 U JP447588 U JP 447588U JP H0631642 Y2 JPH0631642 Y2 JP H0631642Y2
Authority
JP
Japan
Prior art keywords
probe
pin
sample
positioning mechanism
precision positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988004475U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01109169U (en]
Inventor
寛 阪東
亘 水谷
千加良 宮田
茂 脇山
文樹 坂井
Original Assignee
工業技術院長
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1988004475U priority Critical patent/JPH0631642Y2/ja
Publication of JPH01109169U publication Critical patent/JPH01109169U/ja
Application granted granted Critical
Publication of JPH0631642Y2 publication Critical patent/JPH0631642Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1988004475U 1988-01-18 1988-01-18 精密位置決め機構 Expired - Lifetime JPH0631642Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988004475U JPH0631642Y2 (ja) 1988-01-18 1988-01-18 精密位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988004475U JPH0631642Y2 (ja) 1988-01-18 1988-01-18 精密位置決め機構

Publications (2)

Publication Number Publication Date
JPH01109169U JPH01109169U (en]) 1989-07-24
JPH0631642Y2 true JPH0631642Y2 (ja) 1994-08-22

Family

ID=31207022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988004475U Expired - Lifetime JPH0631642Y2 (ja) 1988-01-18 1988-01-18 精密位置決め機構

Country Status (1)

Country Link
JP (1) JPH0631642Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152657U (ja) * 1983-03-31 1984-10-13 日本電子株式会社 電子顕微鏡等の試料移動装置

Also Published As

Publication number Publication date
JPH01109169U (en]) 1989-07-24

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